npj Flexible Electronics (Aug 2018)

Direct writing of anodic oxides for plastic electronics

  • Christian Michael Siket,
  • Nadine Tillner,
  • Andrei Ionut Mardare,
  • Amir Reuveny,
  • Carina Daniela Grill,
  • Florian Hartmann,
  • Gerald Kettlgruber,
  • Richard Moser,
  • Jan Philipp Kollender,
  • Takao Someya,
  • Achim Walter Hassel,
  • Martin Kaltenbrunner,
  • Siegfried Bauer

DOI
https://doi.org/10.1038/s41528-018-0036-y
Journal volume & issue
Vol. 2, no. 1
pp. 1 – 10

Abstract

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Flexible circuits: anodization makes them all! A simple concept of scanning head-guided anodization is shown to be highly expandable to fabricate various electronic components. A team led by Professor Siegfried Bauer from Johannes Kepler University Linz, Austria develops a universal and patternable printing protocol of anodic oxides for a full range of circuit components for flexible devices. The researchers employ a scanning droplet cell microscope to anodize the pre-deposited thin metal films to form dielectric layers with good control in both lateral dimension and vertical thickness. They demonstrate the versatility of the on-site anodization methods by fabricating oxides-based resistors, diodes, transistors and memristors, and multilayer capacitors with a record-high areal capacity of 4 µF cm−2. The approach is cheap, adaptable, and thus ideal for rapid-prototyping of metal oxides circuits for various applications.