Design and characterization of a new microscopy probe using COMSOL and ANSYS

Abstract

This paper presents the design, simulation, and analysis of different 3D-shapes of scanning near-field optical microscopy probes, allowing the acquisition of both topographic and optical images. The study is conducted using COMSOL and ANSYS simulation tools to study the probe sensitivity and deflection. The simulation calculations of deflection and von Mises stress are denoted, analyzed, and compared based on the change in the probe shapes for the same applied force. The results obtained from the two finite element tools were similar, converged to the same ideal design, and showed the impact of the probe structure on the probe performance.