Scalable integration of periodically aligned 2D-MoS2 nanoribbon array

Abstract

Despite the recent growing interest in 2D-MoS2 nanostructures for versatile platforms of sensor applications, robust and practical 2D-MoS2 nanostructures have rarely been reported to date due to the absence of a facile, scalable, and repeatable nanofabrication method. Herein, we show the fabrication of periodically aligned 2D-MoS2 nanoribbon (MNR) array with an area of 2.25 cm2 via direct metal transfer. The MNR width is scalable from 463 nm to 135 nm at 650 nm pitch, and the smallest width is approximately 80 nm. The robust and stable material characteristics are analyzed via various spectroscopic analyses and application sensor devices.