Dianzi Jishu Yingyong (Aug 2019)
High-current density terahertz resonant runneling diodes grown by MOCVD
Abstract
AlAs/InGaAs/AlAs resonant tunneling materials was optimized, and terahertz resonant tunneling diodes grown by MOCVD is first fabricated. The epitaxial layers of the RTD were grown on semi-insulating InP substrate. InP-based RTD were fabricated by using contact lithography and air bridge technology.The electrical characteristics of the device were tested at room temperature. The peak current density of our RTD exceeded 400 kA/cm2, and the peak to valley current ratio of our RTD was 2.4.
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