MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam

Abstract

Thermometry is an interested field in physics and metrology. A capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed and described in this paper. The governing thermo mechanical equations were derived and solved analytically. The temperature rising was expressed with respect to capacitance change of a comb drive. The results of beam deflection were compared well with the existing results.

Keywords

• micro thermometer
• bimetal
• cantilever
• capacitance