Design and test of a piezoelectric micropump based on hydraulic amplification

Abstract

To solve the problem of the small deformation of piezoelectric vibrators and improve the overall performance of piezoelectric micro-pumps, a flexible-diaphragm piezoelectric micropump is designed based on hydraulic amplification. The micropump uses a piezoelectric vibrator to provide its driving force, and fluid is delivered by driving the liquid to amplify the displacement of the piezoelectric vibrator. First, the working principle of the piezoelectric micropump is analyzed, and then theoretical analysis and displacement output tests of the hydraulic amplifier unit are carried out. The test results are consistent with those of the theoretical analysis, and the amplification factor of the hydraulic amplifier unit is 3.29. Finally, prototypes are produced and an experimental platform is built for testing. The results indicate that the best-performing piezoelectric micropump has a self-priming height of 1200 mm, an output pressure of 22.16 kPa, and an output flow of 23.18 ml/min. Compared with an ordinary piezoelectric pump, the overall performance of the piezoelectric micropump is greatly improved.