A 16-channel Si probe monolithically integrated with CMOS chips for neural recording

Guang-Yang Gou; Changhua You; Pan Yao; Yu-Sen Guo; Tie-Zhu Liu; Zi-Xuan Song; Ben-Yuan He; MingHui Yin; Xuan Zhang; Chunxiu Liu; Jun Zhou; Xuan Sun; Chengyu Zhuang; Yuan-Dong Gu; Lei Yao; Ning Xue; Ming Zhao

Sensors and Actuators Reports (Dec 2024)

A 16-channel Si probe monolithically integrated with CMOS chips for neural recording

Guang-Yang Gou,
Changhua You,
Pan Yao,
Yu-Sen Guo,
Tie-Zhu Liu,
Zi-Xuan Song,
Ben-Yuan He,
MingHui Yin,
Xuan Zhang,
Chunxiu Liu,
Jun Zhou,
Xuan Sun,
Chengyu Zhuang,
Yuan-Dong Gu,
Lei Yao,
Ning Xue,
Ming Zhao

Affiliations

Guang-Yang Gou: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing, 100190, China; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
Changhua You: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing, 100190, China; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
Pan Yao: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing, 100190, China; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
Yu-Sen Guo: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing, 100190, China; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
Tie-Zhu Liu: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing, 100190, China; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
Zi-Xuan Song: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing, 100190, China; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
Ben-Yuan He: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing, 100190, China; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
MingHui Yin: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing, 100190, China; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
Xuan Zhang: Shanghai Mtrix Technology Co., Ltd, Shanghai, 201800, China
Chunxiu Liu: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing, 100190, China; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
Jun Zhou: School of Information and Communication Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, China
Xuan Sun: Department of Neurology, Beijing Tiantan Hospital, Capital Medical University, Beijing, 100070, China
Chengyu Zhuang: Department of Orthopaedics, Shanghai Key Laboratory for Prevention and Treatment of Bone and Joint Diseases, Shanghai Institute of Traumatology and Orthopaedics, Ruijin Hospital, Shanghai Jiao Tong University School of Medicine, Shanghai, 200025, China
Yuan-Dong Gu: School of Microelectronics, Shanghai University, Shanghai, 201800, China; Corresponding authors.
Lei Yao: School of Microelectronics, Shanghai University, Shanghai, 201800, China; Corresponding authors.
Ning Xue: State Key Laboratory of Transducer Technology, Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing, 100190, China; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China; Lingang Laboratory, Shanghai, 200031, China; Corresponding authors.
Ming Zhao: Department of Neurosurgery, First Medical Center, Chinese PLA General Hospital, Beijing, 100853, China; Corresponding authors.

Journal volume & issue: Vol. 8
p. 100206

Abstract

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Multi-channel neural electrodes as a crucial means are of great significance for information exchange between the brain and computers. Herein, we present a 16-channel Si-based active neural probe system that achieves a monolithic integration between the electrodes and circuits in a single probe, making it a standalone integrated electrophysiology recording system. The ASIC prepared on a base (2×2mm2) is a 16-channel analog frontend (AFE) for neural recording, and each channel has a low-noise amplifier (LNA), a bandpass filter (BPF), a buffer and a current bias circuit. The 258 neural signal recording electrodes (22×24μm2) are densely packed on a 50 μm thick, 100 μm wide, and 3 mm long shank. The ASIC of neural probe, internal interconnecting wires are all implemented in commercial SMIC 0.18 μm CMOS technology. The neural probe system achieves a 3.6 μVrms input-referred noise (IRN) in a bandwidth of 1.1Hz-10 kHz, 70.8 μW power consumption, 0.0785 mm2 area per channel, as well as an AFE gain of 58.1 dB Furthermore, the impedances of the Au electrodes can be obtained as 0.5–2.1 MΩ at a frequency of 1 kHz. The functionality of a 16-channel silicon-based neural probe is validated in an in-vivo experiment on lab rats.

Published in Sensors and Actuators Reports

ISSN: 2666-0539 (Online)
Publisher: Elsevier
Country of publisher: Netherlands
LCC subjects: Science: Mathematics: Instruments and machines
Website: https://www.journals.elsevier.com/sensors-and-actuators-reports/

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