Applied Physics Express (Jan 2024)
Towards sub-10 nm spatial resolution by tender X-ray ptychographic coherent diffraction imaging
- Nozomu Ishiguro,
- Fusae Kaneko,
- Masaki Abe,
- Yuki Takayama,
- Junya Yoshida,
- Taiki Hoshino,
- Shuntaro Takazawa,
- Hideshi Uematsu,
- Yuhei Sasaki,
- Naru Okawa,
- Keichi Takahashi,
- Hiroyuki Takizawa,
- Hiroyuki Kishimoto,
- Yukio Takahashi
Affiliations
- Nozomu Ishiguro
- ORCiD
- International Center for Synchrotron Radiation Innovation Smart (SRIS), Tohoku University , 468-1 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8572, Japan; RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan
- Fusae Kaneko
- Sumitomo Rubber Industries, Ltd. 2-1-1 Tsutsui, Chuo, Kobe, Hyogo 651-0071, Japan; Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University , 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
- Masaki Abe
- International Center for Synchrotron Radiation Innovation Smart (SRIS), Tohoku University , 468-1 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8572, Japan; RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan
- Yuki Takayama
- ORCiD
- International Center for Synchrotron Radiation Innovation Smart (SRIS), Tohoku University , 468-1 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8572, Japan; RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan; Graduate School of Agricultural Science, Tohoku University , 468‑1, Aoba‑ku, Sendai 980‑0845, Japan; Research Center for Green X-Tech, Green Goals Initiative, Tohoku University , 6-6, Aoba-ku, Sendai 980-8579, Japan
- Junya Yoshida
- ORCiD
- International Center for Synchrotron Radiation Innovation Smart (SRIS), Tohoku University , 468-1 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8572, Japan
- Taiki Hoshino
- ORCiD
- International Center for Synchrotron Radiation Innovation Smart (SRIS), Tohoku University , 468-1 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8572, Japan; RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan; Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University , 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan; Research Center for Green X-Tech, Green Goals Initiative, Tohoku University , 6-6, Aoba-ku, Sendai 980-8579, Japan
- Shuntaro Takazawa
- International Center for Synchrotron Radiation Innovation Smart (SRIS), Tohoku University , 468-1 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8572, Japan; Department of Metallurgy, Graduate School of Engineering, Tohoku University , Aoba-yama 02, Aoba-ku, Sendai 980-8579, Japan
- Hideshi Uematsu
- International Center for Synchrotron Radiation Innovation Smart (SRIS), Tohoku University , 468-1 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8572, Japan; Department of Metallurgy, Graduate School of Engineering, Tohoku University , Aoba-yama 02, Aoba-ku, Sendai 980-8579, Japan
- Yuhei Sasaki
- International Center for Synchrotron Radiation Innovation Smart (SRIS), Tohoku University , 468-1 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8572, Japan; Department of Metallurgy, Graduate School of Engineering, Tohoku University , Aoba-yama 02, Aoba-ku, Sendai 980-8579, Japan
- Naru Okawa
- International Center for Synchrotron Radiation Innovation Smart (SRIS), Tohoku University , 468-1 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8572, Japan; Department of Metallurgy, Graduate School of Engineering, Tohoku University , Aoba-yama 02, Aoba-ku, Sendai 980-8579, Japan
- Keichi Takahashi
- ORCiD
- Cyberscience Center, Tohoku University , 6-3, Aramaki Aza Aoba, Aoba-ku, Sendai 980-8578, Japan
- Hiroyuki Takizawa
- ORCiD
- Cyberscience Center, Tohoku University , 6-3, Aramaki Aza Aoba, Aoba-ku, Sendai 980-8578, Japan
- Hiroyuki Kishimoto
- Sumitomo Rubber Industries, Ltd. 2-1-1 Tsutsui, Chuo, Kobe, Hyogo 651-0071, Japan
- Yukio Takahashi
- ORCiD
- International Center for Synchrotron Radiation Innovation Smart (SRIS), Tohoku University , 468-1 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8572, Japan; RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan; Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University , 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan; Institute for Materials Research, Tohoku University , 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
- DOI
- https://doi.org/10.35848/1882-0786/ad4846
- Journal volume & issue
-
Vol. 17,
no. 5
p. 052006
Abstract
As the first experiment at BL10U in NanoTerasu, tender X-ray ptychographic coherent diffraction imaging (PCDI) was conducted using a photon energy of 3.5 keV. The ptychographic diffraction patterns from a 200 nm thick Ta test chart and a micrometer-sized particle of sulfurized polymer were collected. Subsequently, phase images were reconstructed with resolutions of sub-20 nm and sub-50 nm, respectively. In the near future, tender X-ray PCDI with sub-10 nm resolution is anticipated to potentially revolutionize the visualization of nanoscale structures and chemical states in various functional materials composed of light elements.
Keywords
