Surface micromorphology of Si3N4 ceramic by rotating ultrasonic grinding based on fractal theory

Abstract

To study the surface morphology of Si3N4 ceramics using rotary ultrasonic grinding, changes in the surface morphology under different machining parameters were analyzed based on fractal theory. Orthogonal experiments were designed to compare and analyze the effects of various processing parameters on the fractal dimensions and multifractal spectra of the Si3N4 ceramic surface. Additionally, single-factor experiments were conducted to study the roughness, fractal dimensions, and multifractal spectra of the Si3N4 ceramic surface under different processing parameters. The results show that fractal dimensions can effectively characterize the defect state of the processed surface of Si3N4 ceramics during rotary ultrasonic grinding, while multifractal spectra can better represent the degree of fluctuation in surface defects.

Keywords

• rotary ultrasonic grinding
• si3n4 ceramics
• fractal dimension
• multifractal spectrum
• microstructure