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Open Physics
(Mar 2006)
Structural study of TiO2 thin films by micro-Raman spectroscopy
Niilisk Ahti,
Moppel Mart,
Pärs Martti,
Sildos Ilmo,
Jantson Taavi,
Avarmaa Tea,
Jaaniso Raivo,
Aarik Jaan
Affiliations
Niilisk Ahti
Institute of Physics, University of Tartu, Riia 142, 51014, Tartu, Estonia
Moppel Mart
Institute of Physics, University of Tartu, Riia 142, 51014, Tartu, Estonia
Pärs Martti
Institute of Physics, University of Tartu, Riia 142, 51014, Tartu, Estonia
Sildos Ilmo
Institute of Physics, University of Tartu, Riia 142, 51014, Tartu, Estonia
Jantson Taavi
Institute of Physics, University of Tartu, Riia 142, 51014, Tartu, Estonia
Avarmaa Tea
Institute of Physics, University of Tartu, Riia 142, 51014, Tartu, Estonia
Jaaniso Raivo
Institute of Physics, University of Tartu, Riia 142, 51014, Tartu, Estonia
Aarik Jaan
Institute of Physics, University of Tartu, Riia 142, 51014, Tartu, Estonia
DOI
https://doi.org/10.1007/s11534-005-0009-3
Journal volume & issue
Vol. 4, no. 1
pp. 105 – 116
Abstract
Read online
No abstracts available.
Keywords
titanium dioxide
thin films
atomic layer deposition
pulsed laser deposition
raman spectroscopy
68.55.j
78.30.hv
81.15.-z
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