Scalable growth of vertically oriented graphene nanosheets with high rate by a high-flux mesoplasma chemical vapor deposition

Junjie Wang; Huan Zhang; Yunxing Zhao; Lingze Yao; Min Zhao; Xiaoliang Xu; Baojie Yan; Jichun Ye; Yusheng Zhao; Sudong Wu

Carbon Trends (Jul 2021)

Scalable growth of vertically oriented graphene nanosheets with high rate by a high-flux mesoplasma chemical vapor deposition

Junjie Wang,
Huan Zhang,
Yunxing Zhao,
Lingze Yao,
Min Zhao,
Xiaoliang Xu,
Baojie Yan,
Jichun Ye,
Yusheng Zhao,
Sudong Wu

Affiliations

Junjie Wang: Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China; Nano Science and Technology Institute, University of Science and Technology of China, Suzhou 215123, P.R. China
Huan Zhang: Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China
Yunxing Zhao: Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China
Lingze Yao: Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China; Nano Science and Technology Institute, University of Science and Technology of China, Suzhou 215123, P.R. China
Min Zhao: Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China; Nano Science and Technology Institute, University of Science and Technology of China, Suzhou 215123, P.R. China
Xiaoliang Xu: Key Laboratory of Strongly-Coupled Quantum Matter Physics, Chinese Academy of Sciences, School of Physical Sciences, University of Science and Technology of China, Hefei, 230026, P. R. China; Corresponding authors.
Baojie Yan: Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China
Jichun Ye: Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China; Corresponding authors.
Yusheng Zhao: Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen 518055, P.R. China; Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices, Southern University of Science and Technology, Shenzhen 518055, P.R. China
Sudong Wu: Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen 518055, P.R. China; Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices, Southern University of Science and Technology, Shenzhen 518055, P.R. China; Corresponding authors.

Journal volume & issue: Vol. 4
p. 100069

Abstract

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The Vertically Oriented Graphene Nanosheets (VGNs) possesses many promising properties and attracts intense interests in various applications due to its unique nanoarchitecture and intrinsic properties of graphene. However, a scalable growth of VGNs film with high rate is still an open challenge that hampers both the scientific research and mass applications. Herein, we report for the first time a large area growth of VGNs film with high rate via a high-density and high-flux mesoplasma chemical vapor deposition by rotating the substrate. A uniform VGNs film on a large area with a high growth rate on the order of ten micrometer per minute has been obtained. A continues growth process of VGNs film with high rate is also predicted by sweeping the substrate, which gives a new route for the scalable growth of VGNs film with high rate for the future mass applications.

Published in Carbon Trends

ISSN: 2667-0569 (Online)
Publisher: Elsevier
Country of publisher: United Kingdom
LCC subjects: Science: Chemistry
Website: https://www.journals.elsevier.com/carbon-trends/

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