Mapping Oxidation and Wafer Cleaning to Device Characteristics Using Physics-Assisted Machine Learning

• Sparsh Pratik,
• Po-Ning Liu,
• Jun Ota,
• Yen-Liang Tu,
• Guan-Wen Lai,
• Ya-Wen Ho,
• Zheng-Kai Yang,
• Tejender Singh Rawat,
• Albert S. Lin

Affiliations

Sparsh Pratik

Institute of Electronics Engineering, National Yang Ming Chiao-Tung University, Hsinchu City, Taiwan, R.O.C.

Po-Ning Liu

Institute of Electronics Engineering, National Yang Ming Chiao-Tung University, Hsinchu City, Taiwan, R.O.C.

Jun Ota

Institute of Electronics Engineering, National Yang Ming Chiao-Tung University, Hsinchu City, Taiwan, R.O.C.

Yen-Liang Tu

Institute of Electronics Engineering, National Yang Ming Chiao-Tung University, Hsinchu City, Taiwan, R.O.C.

Guan-Wen Lai

Institute of Electronics Engineering, National Yang Ming Chiao-Tung University, Hsinchu City, Taiwan, R.O.C.

Ya-Wen Ho

Institute of Electronics Engineering, National Yang Ming Chiao-Tung University, Hsinchu City, Taiwan, R.O.C.

Zheng-Kai Yang

Institute of Electronics Engineering, National Yang Ming Chiao-Tung University, Hsinchu City, Taiwan, R.O.C.

Tejender Singh Rawat

Institute of Electronics Engineering, National Yang Ming Chiao-Tung University, Hsinchu City, Taiwan, R.O.C.

Albert S. Lin

Institute of Electronics Engineering, National Yang Ming Chiao-Tung University, Hsinchu City, Taiwan, R.O.C.