The new method of fabrication of submicron structures by optical lithography with mask shifting and mask rotation

• Indykiewicz Kornelia,
• Hajłasz Marcin,
• Paszkiewicz Bogdan

Affiliations

Indykiewicz Kornelia

Faculty of Microsystems Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50 - 372, Wrocław, Poland

Hajłasz Marcin

Faculty of Microsystems Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50 - 372, Wrocław, Poland

Paszkiewicz Bogdan

Faculty of Microsystems Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50 - 372, Wrocław, Poland