POSSIBILITIES OF STUDYING OF NANOOBJECTS IN POROUS SILICON AND WAFERS OF SILICON IRRADIATED BY PROTONS BY METHOD OF POSITRON ANNIHILATION SPECTROSCOPY

V.I. Grafutin; O.V. Ilyukhina; G.G. Myasishcheva; E.P. Prokopiev; S.P. Timoshenkov; Yu.V. Funtikov

Вестник. Серия физическая (Sep 2009)

POSSIBILITIES OF STUDYING OF NANOOBJECTS IN POROUS SILICON AND WAFERS OF SILICON IRRADIATED BY PROTONS BY METHOD OF POSITRON ANNIHILATION SPECTROSCOPY

V.I. Grafutin,
O.V. Ilyukhina,
G.G. Myasishcheva,
E.P. Prokopiev,
S.P. Timoshenkov,
Yu.V. Funtikov

Affiliations

V.I. Grafutin: FSUE SSC RF A.I. Alikhanov Institute of Theoretical and Experimental Physics, Moscow
O.V. Ilyukhina: FSUE SSC RF A.I. Alikhanov Institute of Theoretical and Experimental Physics, Moscow
G.G. Myasishcheva: FSUE SSC RF A.I. Alikhanov Institute of Theoretical and Experimental Physics, Moscow
E.P. Prokopiev: FSUE SSC RF A.I. Alikhanov Institute of Theoretical and Experimental Physics, Moscow
S.P. Timoshenkov: Moscow State Institute of Electronic Engineering (MIET), Zelenograd
Yu.V. Funtikov: FSUE SSC RF A.I. Alikhanov Institute of Theoretical and Experimental Physics, Moscow

Journal volume & issue: Vol. 30, no. 3
pp. 47 – 54

Abstract

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It is shown, that one of effective modern methods of definition of the nanodefect sizes (vacancies, vacansion clasters), free volumes of porous, cavities, emptiness in nanomaterials and porous systems is the method of positron annihilation spectroscopy (PAS). Examples of definition of the sizes and concentration of porous and free volumes in porous silicon, silicon and the monocrystals of quartz irradiated by protons are resulted.

Published in Вестник. Серия физическая

ISSN: 1563-0315 (Print); 2663-2276 (Online)
Publisher: Al-Farabi Kazakh National University
Country of publisher: Kazakhstan
LCC subjects: Science: Physics
Website: https://bph.kaznu.kz/index.php/zhuzhu/index

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