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BIO Web of Conferences
(Jan 2024)
Strain analysis comparison in complementary and nanosheet field-effect transistor devices: Nanobeam vs Bessel electron diffraction
Favia Paola,
Veloso Anabela,
Eneman Geert,
Mehta Ankit Nalin,
Zhou Xiuju,
Richard Olivier,
Geypen Jef,
Grieten Eva
Affiliations
Favia Paola
Imec
Veloso Anabela
Imec
Eneman Geert
Imec
Mehta Ankit Nalin
Imec
Zhou Xiuju
Imec
Richard Olivier
Imec
Geypen Jef
Imec
Grieten Eva
Imec
DOI
https://doi.org/10.1051/bioconf/202412924025
Journal volume & issue
Vol. 129
p. 24025
Abstract
Read online
No abstracts available.
Keywords
strain
cfet
nanosheet-fet
nbd
bessel
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