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Open Physics
(Feb 2013)
Study of interface reactions between Ti/Al/Ni/Au metallization and AlGaN/GaN heterostructures
Macherzyński Wojciech,
Paszkiewicz Bogdan
Affiliations
Macherzyński Wojciech
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, 11/17 Janiszewskiego Street, 50-372, Wrocław, Poland
Paszkiewicz Bogdan
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, 11/17 Janiszewskiego Street, 50-372, Wrocław, Poland
DOI
https://doi.org/10.2478/s11534-012-0158-0
Journal volume & issue
Vol. 11, no. 2
pp. 258 – 263
Abstract
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No abstracts available.
Keywords
ohmic contact
algan/gan heterostructure
two-dimensional electron gas (2deg)
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