Micromachines (May 2018)

A Low Power Energy-Efficient Precision CMOS Temperature Sensor †

  • Rongshan Wei,
  • Xiaotian Bao

DOI
https://doi.org/10.3390/mi9060257
Journal volume & issue
Vol. 9, no. 6
p. 257

Abstract

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This paper presents a low power, energy-efficient precision CMOS temperature sensor. The front-end circuit is based on bipolar junction transistors, and employs a pre-bias circuit and bipolar core. To reduce measurement errors arising from current ratio mismatch, a new dynamic element-matching mode is proposed, which dynamically matches all current sources in the front-end circuit. The first-order fitting and third-order fitting are used to calibrate the output results. On the basis of simulation results, the sensor achieves 3σ-inaccuracies of +0.18/−0.13 °C from −55 °C to +125 °C. Measurement results demonstrate sensor 3σ-inaccuracies of ±0.2 °C from 0 °C to +100 °C. The circuit is implemented in 0.18 μm CMOS, and consumes 6.1 μA with a 1.8 V supply voltage.

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