Design of a Novel Three-Degree-of-Freedom Piezoelectric-Driven Micro-Positioning Platform with Compact Structure

Chuan Zhao; Zhenlong Li; Fangchao Xu; Hongkui Zhang; Feng Sun; Junjie Jin; Xiaoyou Zhang; Lijian Yang

doi:10.3390/act13070248

Actuators (Jun 2024)

Design of a Novel Three-Degree-of-Freedom Piezoelectric-Driven Micro-Positioning Platform with Compact Structure

Chuan Zhao,
Zhenlong Li,
Fangchao Xu,
Hongkui Zhang,
Feng Sun,
Junjie Jin,
Xiaoyou Zhang,
Lijian Yang

Affiliations

Chuan Zhao: School of Mechanical Engineering, Shenyang University of Technology, Shenyang 110870, China
Zhenlong Li: School of Mechanical Engineering, Shenyang University of Technology, Shenyang 110870, China
Fangchao Xu: School of Mechanical Engineering, Shenyang University of Technology, Shenyang 110870, China
Hongkui Zhang: Shenyang Research Institute, China Coal Technology & Engineering Group, Fushun 113122, China
Feng Sun: School of Mechanical Engineering, Shenyang University of Technology, Shenyang 110870, China
Junjie Jin: School of Mechanical Engineering, Shenyang University of Technology, Shenyang 110870, China
Xiaoyou Zhang: Nippon Institute of Technology, Saitama 345-8501, Japan
Lijian Yang: School of Information Science and Engineering, Shenyang University of Technology, Shenyang 110870, China

DOI: https://doi.org/10.3390/act13070248
Journal volume & issue: Vol. 13, no. 7
p. 248

Abstract

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In this paper, a novel three-degree-of-freedom piezoelectric-driven micro-positioning platform based on a lever combination compound bridge-type displacement amplification mechanism is proposed. The micro-positioning platform proposed in this paper aims to solve the current problem of the large size and small travel of the three-degree-of-freedom piezoelectric-driven micro-positioning platform. In this paper, a lever combination compound bridge-type displacement amplification mechanism combined with a new biaxial flexible hinge is proposed, the structural dimensions of the lever mechanism and the compound bridge mechanism are optimized, and the amplification multiplier is determined. The maximum output simulation analysis of the micro-positioning platform is carried out by using ANSYS, and the experimental test system is built for verification. The validation results show that the maximum errors between simulation and experiment in the z-direction, rotation direction around x, and rotation direction around y are 64 μm, 0.016°, and 0.038°, respectively, and the corresponding maximum relative errors are 5.6%, 2.4%, and 6.6%, respectively, which proves the feasibility of the theoretical design.

Published in Actuators

ISSN: 2076-0825 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials; Technology: Electrical engineering. Electronics. Nuclear engineering: Production of electric energy or power. Powerplants. Central stations
Website: http://www.mdpi.com/journal/actuators

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