Micromachines (Nov 2022)

Simulation of Laser-Heating and Energetic Plasma Plume Expansion in Pulsed Laser Deposition of Y<sub>3</sub>Fe<sub>5</sub>O<sub>12</sub>

  • Joko Suwardy,
  • Muzakkiy Putra Muhammad Akhir,
  • Robi Kurniawan,
  • Beni Rio Hermanto,
  • Isa Anshori,
  • Mohammad Hamzah Fauzi

DOI
https://doi.org/10.3390/mi13112012
Journal volume & issue
Vol. 13, no. 11
p. 2012

Abstract

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In the present study, numerically iterative models are employed to study two processes involved in the pulsed laser deposition of an Y3Fe5O12 target. The 1D conduction heat model is used to evaluate the temperature of the target irradiated by a nano-second pulse laser, taking into account the plasma shielding effect. Further, the gas dynamics model is employed to simulate the kinetic of plasma plume expansion. The results may be important in obtaining high-quality Y3Fe5O12 thin films.

Keywords