Fabrication of multianalyte CeO2 nanograin electrolyte–insulator–semiconductor biosensors by using CF4 plasma treatment

Chyuan Haur Kao; Hsiang Chen; Fang Yao Stephen Hou; Shan Wei Chang; Che Wei Chang; Chao Sung Lai; Chin Pang Chen; Yun Yang He; Shang-Ren Lin; Kun Min Hsieh; Min Han Lin

Sensing and Bio-Sensing Research (Sep 2015)

Fabrication of multianalyte CeO2 nanograin electrolyte–insulator–semiconductor biosensors by using CF4 plasma treatment

Chyuan Haur Kao,
Hsiang Chen,
Fang Yao Stephen Hou,
Shan Wei Chang,
Che Wei Chang,
Chao Sung Lai,
Chin Pang Chen,
Yun Yang He,
Shang-Ren Lin,
Kun Min Hsieh,
Min Han Lin

Affiliations

Chyuan Haur Kao: Department of Electronic Engineering, Chang Gung University, Taiwan, ROC; Center for Biomedical Engineering, Chang Gung University, Taiwan, ROC
Hsiang Chen: Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Taiwan, ROC; Corresponding author.
Fang Yao Stephen Hou: Clinical Laboratory, Marquette University, USA
Shan Wei Chang: Department of Electronic Engineering, Chang Gung University, Taiwan, ROC; Center for Biomedical Engineering, Chang Gung University, Taiwan, ROC
Che Wei Chang: Department of Electronic Engineering, Chang Gung University, Taiwan, ROC; Center for Biomedical Engineering, Chang Gung University, Taiwan, ROC
Chao Sung Lai: Department of Electronic Engineering, Chang Gung University, Taiwan, ROC; Center for Biomedical Engineering, Chang Gung University, Taiwan, ROC
Chin Pang Chen: Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Taiwan, ROC
Yun Yang He: Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Taiwan, ROC
Shang-Ren Lin: Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Taiwan, ROC
Kun Min Hsieh: Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Taiwan, ROC
Min Han Lin: Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Taiwan, ROC

Journal volume & issue: Vol. 5
pp. 71 – 77

Abstract

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Multianalyte CeO2 biosensors have been demonstrated to detect pH, glucose, and urine concentrations. To enhance the multianalyte sensing capability of these biosensors, CF4 plasma treatment was applied to create nanograin structures on the CeO2 membrane surface and thereby increase the contact surface area. Multiple material analyses indicated that crystallization or grainization caused by the incorporation of flourine atoms during plasma treatment might be related to the formation of the nanograins. Because of the changes in surface morphology and crystalline structures, the multianalyte sensing performance was considerably enhanced. Multianalyte CeO2 nanograin electrolyte–insulator–semiconductor biosensors exhibit potential for use in future biomedical sensing device applications. Keywords: Multianalyte biosensor, CeO2 nanograin, EIS, CF4 plasma treatment, Membrane surface

Published in Sensing and Bio-Sensing Research

ISSN: 2214-1804 (Online)
Publisher: Elsevier
Country of publisher: Netherlands
LCC subjects: Technology: Engineering (General). Civil engineering (General)
Website: http://www.journals.elsevier.com/sensing-and-bio-sensing-research/

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