Enhanced Electrode Deposition for On-Chip Integrated Micro-Supercapacitors by Controlled Surface Roughening

• Agin Vyas,
• Kejian Wang,
• Alec Anderson,
• Andres Velasco,
• Ruben Van den Eeckhoudt,
• Mohammad Mazharul Haque,
• Qi Li,
• Anderson Smith,
• Per Lundgren,
• Peter Enoksson

Affiliations

Agin Vyas

Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Gothenburg, Sweden

Kejian Wang

Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Gothenburg, Sweden

Alec Anderson

University of California Santa Barbara, Santa Barbara, California, United States

Andres Velasco

Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Gothenburg, Sweden

Ruben Van den Eeckhoudt

Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Gothenburg, Sweden

Mohammad Mazharul Haque

Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Gothenburg, Sweden

Qi Li

Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Gothenburg, Sweden

Anderson Smith

Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Gothenburg, Sweden

Per Lundgren

Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Gothenburg, Sweden

Peter Enoksson

Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Gothenburg, Sweden