Gas Sensor Based on ZnO Nanostructured Film for the Detection of Ethanol Vapor

Abstract

In this paper, the ZnO target was synthesized by the solid-state reaction method and a nanostructured thin film was deposited by the RF (radio frequency) magnetron sputtering method on a Multi-Sensor-Platform. The obtained ZnO nanostructured film was investigated as the sensing material. Energy-Dispersive X-ray (EDX) analysis indicated the existence of La in the synthesized ZnO material. Scanning Electron Microscope (SEM) images of the film showed the grain sizes in the range of 20–40 nm. Sensor performance characteristics such as a dynamic response, response and recovery times, and ethanol detection range were investigated at 50–300 °C. A sensitivity was observed at extremely low concentrations of ethanol (0.7 ppm). The minimum response and recovery times of the sensor corresponding to 675 ppm ethanol vapor concentration at 250 °C were found to be 14 s and 61 s, respectively. The sensor showed a high response, good selectivity, fast response/recovery behavior, excellent repeatability toward ethanol vapor, and low sensitivity toward humidity. These characteristics enable the use of a ZnO based sensor for ethanol detecting applications.

Keywords

• ethanol sensor
• magnetron sputtering
• nanograins
• sensitivity
• thin film
• zinc oxide