Bioinspired Suspended Sensing Membrane Array with Modulable Wedged‐Conductive Channels for Crosstalk‐Free and High‐Resolution Detection

Abstract

Abstract High spatial‐resolution detection is essential for biomedical applications and human‐machine interaction. However, as the sensor array density increases, the miniaturization will lead to interference between adjacent units and deterioration in sensing performance. Here, inspired by the cochlea's sensing structure, a high‐density flexible pressure sensor array featuring with suspended sensing membrane with sensitivity‐enhanced customized channels is presented for crosstalk‐free and high‐resolution detection. By imitating the basilar membrane attached to spiral ligaments, a sensing membrane is fixed onto a high‐stiffness substrate with cavities, forming a stable braced isolation to provide an excellent crosstalk‐free capability (crosstalk coefficient: 47.24 dB) with high‐density integration (100 units within 1 cm2). Similar to the opening of ion channels in hair cells, the wedge‐type expansion of the embedded cracks introduced by stress concentration structures enables a high sensitivity (0.19 kPa−1) and a large measuring range (400 kPa). Finally, it demonstrates promising applications in distributed displays and the condition monitoring of medical‐surgical intubation.

Keywords

• bioinspired
• crosstalk‐free
• customized structures
• high density
• microchannels
• sensor array