Iterative Parameter Optimization for Multiple Switching Control Applied to a Precision Stage for Microfabrication

Abstract

This paper proposes an iteration procedure to derive optimal parameters for a multiple switching control architecture. Control design is usually a compromise between various performance requirements; therefore, switching between multiple controllers that achieve a particular performance under different conditions can potentially improve the overall system behavior. In this paper, we consider a control-switching mechanism that can automatically switch controllers based on the prediction of future responses, and we develop an iteration procedure that can optimize the mechanism parameters, such as the number of controllers and the prediction horizon. We then implement the proposed mechanism in a long-stroke precision stage, and demonstrate the effectiveness of switching robust control with simulations and experiments. Lastly, we integrate the stage with a two-photon polymerization system to fabricate microlenses. The optical properties confirm that the proposed iterative parameter optimization procedure is effective in improving the performance of microfabrication employing multiple switching control.

Keywords

• switching control
• iterative parameter tuning
• robust control
• precision positioning
• PZT stage
• two-photon polymerization