Design and simulation of the helicon plasma system with 1.5 kW RF power and 13.56 MHz frequency

Abstract

In this paper, a Helicon plasma system with Nagoya Type III antenna was designed and simulated by using COMSOL Multiphysics 5.2. In our simulation, all effective interactions and parameters in the plasma production process are considered. Besides, the cross-sections of the reactions which are occurred in the plasma with the energy range from 0.001 eV to 1MeV are applied in the software. Meanwhile, the Argon-Helicon plasma is produced by using Nagoya Type III antenna considering the following conditions: the magnetic field of 600 G, the antenna current 6 Ampere, with the operating gas pressure 10 mTorr and inlet gas flux of 50 (SCCM). Finally, the plasma density of the order 2×1018 m-3 and a temperature of 2.6 eV were obtained by using the Nagoya antenna. The effect of the variations of the current, which was applied to the Nagoya antenna, on the density and absorbed power of the Helicon plasma was also investigated. This simulation was made for seven operational helicon devices, and the results have seemed reasonable.

Keywords

• helicon plasma
• rf plasmas
• simulation