Characterization of surface modification in atomic force microscope-induced nanolithography of oxygen deficient La0.67Ba0.33MnO3−δ thin films

E. Kevin Tanyi; Rajeswari M. Kolagani; Parul Srivastava; William Vanderlinde; Grace Yong; Christopher Stumpf; David Schaefer

doi:10.1063/1.4904427

AIP Advances (Dec 2014)

Characterization of surface modification in atomic force microscope-induced nanolithography of oxygen deficient La0.67Ba0.33MnO3−δ thin films

E. Kevin Tanyi,
Rajeswari M. Kolagani,
Parul Srivastava,
William Vanderlinde,
Grace Yong,
Christopher Stumpf,
David Schaefer

Affiliations

E. Kevin Tanyi: Department of Physics, Astronomy & Geosciences, Towson University, Towson MD 21043, U.S.A
Rajeswari M. Kolagani: Department of Physics, Astronomy & Geosciences, Towson University, Towson MD 21043, U.S.A
Parul Srivastava: Department of Physics, Astronomy & Geosciences, Towson University, Towson MD 21043, U.S.A
William Vanderlinde: Laboratory for Physical Sciences, 8050 Greenmead Drive, College Park, MD 20740, U.S.A
Grace Yong: Department of Physics, Astronomy & Geosciences, Towson University, Towson MD 21043, U.S.A
Christopher Stumpf: Department of Physics, Astronomy & Geosciences, Towson University, Towson MD 21043, U.S.A
David Schaefer: Department of Physics, Astronomy & Geosciences, Towson University, Towson MD 21043, U.S.A

DOI: https://doi.org/10.1063/1.4904427
Journal volume & issue: Vol. 4, no. 12
pp. 127129 – 127129-14

Abstract

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We report our studies of the nanolithographic surface modifications induced by an Atomic Force Microscope (AFM) in epitaxial thin films of oxygen deficient Lanthanum Barium Manganese Oxide (La0.67Ba0.33MnO3−δ). The pattern characteristics depend on the tip voltage, tip polarity, voltage duration, tip force, and humidity. We have used Electron Energy Dispersive X-Ray Spectroscopy (EDS) to analyze the chemical changes associated with the surface modifications produced with a negatively biased AFM tip. A significant increase in the oxygen stoichiometry for the patterned regions relative to the pristine film surface is observed. The results also indicate changes in the cation stoichiometry, specifically a decrease in the Lanthanum and Manganese concentrations and an increase in the Barium concentration in the patterned regions.

Published in AIP Advances

ISSN: 2158-3226 (Online)
Publisher: AIP Publishing LLC
Country of publisher: United States
LCC subjects: Science: Physics
Website: http://aipadvances.aip.org/

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