Microheater Topology for Advanced Gas Sensor Applications with Carbyne-Enriched Nanomaterials

Abstract

The response characteristics of carbyne-enriched surface-acoustic-wave (SAW)-based gas sensors utilizing meander and rectangular microheater topologies were investigated to assess their desorption and recovery properties. Comparative analysis of contact resistance and interface capacitance before and after heating revealed minimal deviation in contact resistance, signifying strong thermal stability in the carbyne-enriched layer. However, the interface capacitance varied with the microheater size. Our analysis reveals that a small meander microheater configuration (line width: 300 µm) facilitates efficient sensor recovery at ethanol concentration measurements in the range of 180–680 ppm, maintaining a low deviation in time delay across different concentrations (~2.3%), resulting in a narrow hysteresis and linear sensor response. Conversely, the large meander microheater (line width: 450 µm) and rectangular dense microheater induce irreversible changes in the sensing structure, leading to a widened hysteresis at higher concentrations and increased power consumption. Recovery patterns display substantial deviations from initial values at different concentration levels. Higher concentrations exhibit broader hysteresis, while lower concentrations show narrower hysteresis loops, compared to the small meander microheater. The study offers insights into desorption rates, power consumption variations, and recovery behaviors related to different microheater configurations. It demonstrates the importance of microheater topology selection in tailoring recovery properties and response characteristics, contributing to the advancement of carbyne-based sensor technology.

Keywords

• carbyne-enriched layer
• SAW sensor
• microheater topology
• sensor recovery