Theoretical analysis of surface acoustic wave propagating properties of Y-cut nano lithium niobate film on silicon dioxide

Jing Chen; Qiaozhen Zhang; Tao Han; Liu Zhou; Gongbin Tang; Boquan Liu; Xiaojun Ji

doi:10.1063/1.4929774

AIP Advances (Aug 2015)

Theoretical analysis of surface acoustic wave propagating properties of Y-cut nano lithium niobate film on silicon dioxide

Jing Chen,
Qiaozhen Zhang,
Tao Han,
Liu Zhou,
Gongbin Tang,
Boquan Liu,
Xiaojun Ji

Affiliations

Jing Chen: Department of Instrument Science and Engineering, Shanghai Jiaotong University, Shanghai 200240, China
Qiaozhen Zhang: Department of Instrument Science and Engineering, Shanghai Jiaotong University, Shanghai 200240, China
Tao Han: Department of Instrument Science and Engineering, Shanghai Jiaotong University, Shanghai 200240, China
Liu Zhou: Department of Instrument Science and Engineering, Shanghai Jiaotong University, Shanghai 200240, China
Gongbin Tang: Department of Instrument Science and Engineering, Shanghai Jiaotong University, Shanghai 200240, China
Boquan Liu: Department of Instrument Science and Engineering, Shanghai Jiaotong University, Shanghai 200240, China
Xiaojun Ji: Department of Instrument Science and Engineering, Shanghai Jiaotong University, Shanghai 200240, China

DOI: https://doi.org/10.1063/1.4929774
Journal volume & issue: Vol. 5, no. 8
pp. 087173 – 087173-5

Abstract

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The surface acoustic wave (SAW) propagating characteristics of Y-cut nano LiNbO3 (LN) film on SiO2/LN substrate have been theoretically calculated. The simulated results showed a shear horizontal (SH) SAW with enhanced electromechanical coupling factor K2 owing to a dimensional effect of the nanoscale LN film. However, a Rayleigh SAW and two other resonances related to thickness vibrations caused spurious responses for wideband SAW devices. These spurious waves could be fully suppressed by properly controlling structural parameters including the electrode layer height, thickness, and the Euler angle (θ) of the LN thin film. Finally, a pure SH SAW was obtained with a wide θ range, from 0° to 5° and 165° to 180°. The largest K2 achieved for the pure SH SAW was about 35.1%. The calculated results demonstrate the promising application of nano LN film to the realization of ultra-wideband SAW devices.

Published in AIP Advances

ISSN: 2158-3226 (Online)
Publisher: AIP Publishing LLC
Country of publisher: United States
LCC subjects: Science: Physics
Website: http://aipadvances.aip.org/

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