Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization

Qiang Geng; Dien Wang; Pengfei Chen; Shih-Chi Chen

doi:10.1038/s41467-019-10249-2

Nature Communications (May 2019)

Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization

Qiang Geng,
Dien Wang,
Pengfei Chen,
Shih-Chi Chen

Affiliations

Qiang Geng: Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong
Dien Wang: Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong
Pengfei Chen: Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong
Shih-Chi Chen: Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong

DOI: https://doi.org/10.1038/s41467-019-10249-2
Journal volume & issue: Vol. 10, no. 1
pp. 1 – 7

Abstract

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Two photon polymerization (TPP) allows nanofabrication of three dimensional objects with complex geometries, but is considered to be slow with a limited fabrication rate. Here the authors present a TPP technique based on a digital mirror device scanner which allows for fast parallel nanofabrication with improved precision and flexibility.

Published in Nature Communications

ISSN: 2041-1723 (Online)
Publisher: Nature Portfolio
Country of publisher: United Kingdom
LCC subjects: Science
Website: https://www.nature.com/ncomms/

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