Study on High Precision MEMS Inertial Sensor with Increased Detection Capacitance Driven by Electromagnetism

Abstract

Since the reactive ion etching technique of depth particle is complex, the sensor with large mass and large initial capacitance can hardly be achieved. This paper improves this defect by greatly increasing the capacitance of the sensor during the static test driven by electromagnetism. The results show that the mechanical noise reaches 0161Lg per square root of Hertz, and its simulated resonance frequency is 598Hz, indicating that the design of this paper has good performance on production technology and parameters setting, and the test driven by electromagnetism is feasible.