Tunable Ag Nanocavity Enhanced Green Electroluminescence from SiN<sub>x</sub>:O Light-Emitting Diode

Zongyan Zuo; Zhongyuan Ma; Tong Chen; Wenping Zhang; Wei Li; Jun Xu; Ling Xu; Kunji Chen

doi:10.3390/nano14151306

Nanomaterials (Aug 2024)

Tunable Ag Nanocavity Enhanced Green Electroluminescence from SiN<sub>x</sub>:O Light-Emitting Diode

Zongyan Zuo,
Zhongyuan Ma,
Tong Chen,
Wenping Zhang,
Wei Li,
Jun Xu,
Ling Xu,
Kunji Chen

Affiliations

Zongyan Zuo: School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China
Zhongyuan Ma: School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China
Tong Chen: School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China
Wenping Zhang: School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China
Wei Li: School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China
Jun Xu: School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China
Ling Xu: School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China
Kunji Chen: School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China

DOI: https://doi.org/10.3390/nano14151306
Journal volume & issue: Vol. 14, no. 15
p. 1306

Abstract

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As the driving source, highly efficient silicon-based light emission is urgently needed for the realization of optoelectronic integrated chips. Here, we report that enhanced green electroluminescence (EL) can be obtained from oxygen-doped silicon nitride (SiNx:O) films based on an ordered and tunable Ag nanocavity array with a high density by nanosphere lithography and laser irradiation. Compared with that of a pure SiNxO device, the green electroluminescence (EL) from the SiNx:O/Ag nanocavity array device can be increased by 7.1-fold. Moreover, the external quantum efficiency of the green electroluminescence (EL) is enhanced 3-fold for SiNx:O/Ag nanocavity arrays with diameters of 300 nm. The analysis of absorption spectra and the FDTD calculation reveal that the localized surface plasmon (LSP) resonance of size-controllable Ag nanocavity arrays and SiNx:O films play a key role in the strong green EL. Our discovery demonstrates that SiNx:O films coupled with tunable Ag nanocavity arrays are promising for silicon-based light-emitting diode devices of the AI period in the future.

Published in Nanomaterials

ISSN: 2079-4991 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Science: Chemistry
Website: https://www.mdpi.com/journal/nanomaterials

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