Advances in Capacitive Micromachined Ultrasonic Transducers

Kevin Brenner; Arif Sanli Ergun; Kamyar Firouzi; Morten Fischer Rasmussen; Quintin Stedman; Butrus (Pierre) Khuri–Yakub

doi:10.3390/mi10020152

Micromachines (Feb 2019)

Advances in Capacitive Micromachined Ultrasonic Transducers

Kevin Brenner,
Arif Sanli Ergun,
Kamyar Firouzi,
Morten Fischer Rasmussen,
Quintin Stedman,
Butrus (Pierre) Khuri–Yakub

Affiliations

Kevin Brenner: E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA
Arif Sanli Ergun: E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA
Kamyar Firouzi: E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA
Morten Fischer Rasmussen: E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA
Quintin Stedman: E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA
Butrus (Pierre) Khuri–Yakub: E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA

DOI: https://doi.org/10.3390/mi10020152
Journal volume & issue: Vol. 10, no. 2
p. 152

Abstract

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Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

About the journal

Abstract

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