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ACS Omega
(Feb 2022)
Study of Cryogenic Unmasked Etching of “Black Silicon” with Ar Gas Additives
Ekaterina A. Vyacheslavova,
Ivan A. Morozov,
Dmitri A. Kudryashov,
Alexander V. Uvarov,
Artem I. Baranov,
Alina A. Maksimova,
Sergey N. Abolmasov,
Alexander S. Gudovskikh
Affiliations
Ekaterina A. Vyacheslavova
Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia
Ivan A. Morozov
Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia
Dmitri A. Kudryashov
Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia
Alexander V. Uvarov
Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia
Artem I. Baranov
Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia
Alina A. Maksimova
Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia
Sergey N. Abolmasov
R&D Center of Thin Film Technologies (Hevel LLC), Saint Petersburg, Russia
Alexander S. Gudovskikh
Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia
DOI
https://doi.org/10.1021/acsomega.1c06435
Journal volume & issue
Vol. 7, no. 7
pp. 6053 – 6057
Abstract
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No abstracts available.
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