Mini-review on periodic properties of MEMS oscillators

Abstract

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This paper features a survey of the periodic property of micro-electro-mechanical systems by the homotopy perturbation method, the variational iteration method, the variational theory, He’s frequency formulation, and Taylor series method. Fractal MEMS systems are also introduced, and future prospective is elucidated. The emphasis of this min-review article is put mainly on the developments in last decade, so the references, therefore, are not exhaustive.

Keywords

• micro-electro-mechanical system (MEMS)
• variational theory
• taylor series
• frequency-amplitude relationship
• two-scale fractal