Highly dispersive multiplexed micromechanical device array for spatially resolved sensing and actuation

Abstract

Abstract The powerful resource of parallelizing simple devices for realizing and enhancing complex operations comes with the drawback of multiple connections for addressing and controlling the individual elements. Here we report on a technological platform where several mechanical resonators can be individually probed and electrically actuated by using dispersive multiplexing within a single electrical channel. We demonstrate room temperature control of the individual device vibrational motion and spatially-resolved readouts. As the single elements have proven to be excellent bolometers and individual nodes for reservoir computing, our platform can be directly employed for single-channel addressing of multiple devices, with immediate applications for far-infrared cameras, spatial light modulators and recurrent neural networks operating at room temperature.