Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO₂ Laser

Abstract

A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO2 laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for pressure sensing. The fabricated FP cavity has a fringe contrast larger than 15 dB. The experimental results show that the fabricated device has a linear response to the change in pressure, with a sensitivity of −2.02 nm/MPa in the range of 0 to 4 MPa. The results demonstrate that the proposed fabrication technique can be used for fabricating optical fiber microcavities for sensing applications.

Keywords

• optical fiber sensor
• Fabry–Pérot cavity
• pressure sensing
• CO₂ laser welding