Solving of the Boltzmann transport equation using two - term approximation for pure electronegative gases (SF6, CCl2F2)

Abstract

The Boltzmann transport equation is solved by using two-term approximation for pure electronegative gases (SF6, CCl2F2). This method used to calculate the electron energy distribution function (EEDF) and electron swarm parameters in the range of E/N varying from 100 Td to 1000 Td (1 Td=10-17 V.cm2). Electron swarm parameters have been calculated as a function of E/N namely: drift velocity, mean electron energy, characteristic energy, diffusion coefficients, mobility, and attachment and ionization coefficients also effective ionization coefficient. The results have shown that the calculated swarm parameters were in good agreements with those obtained by experiment and theoretical (Three-term and Monte Carlo Simulation) methods. A set of elastic and inelastic cross-sections have been collected for each gas such that the computed and experimental values gave good agreement for each swarm parameter over the entire E/N range

Keywords

• Plasma
• Boltzmann equation
• Transport parameters
• Electron kinetics