Integrated On-Chip Transformers: Recent Progress in the Design, Layout, Modeling and Fabrication

Abstract

On-chip transformers are considered to be the primary components in many RF wireless applications. This paper provides an in-depth review of on-chip transformers, starting with a presentation on the various equivalent circuit models to represent transformer behavior and characterize their performance. Next, a comparative study on the different design and layout strategies is provided, and the fabrication techniques for on-chip implementation of transformers are discussed. The critical performance parameters to characterize on-chip transformers, such as the Q-factor, coupling factor (k), resonance frequency (fSR), and others, are discussed with reference to trade-offs in silicon chip real-estate. The performance parameters and area requirements for different types of on-chip transformers are summarized in tabular form and compared. Several techniques for performance enhancement of on-chip transformers, including the different types of micromachining and integration approaches stemming from MEMS (microelectromechanical systems) technologies are also analyzed. Lastly, the different uses and applications of on-chip transformers are discussed to highlight the evolution of on-chip transformer technology over the recent years and provide directions for future work in this field.

Keywords

• on-chip transformer
• CMOS integration
• RF-MEMS transformer
• monolithic
• balun
• coupling coefficient
• modeling
• power gain
• <i>Q</i>-factor
• self-resonance frequency
• interleaved layout
• stacked layout
• transformer characteristic resistance
• RFIC
• LNA
• 5G