FEATURES OF MICROGEOMETRY RESPONSE AND SURFACE PROPERTIES OF DIELECTRIC MATERIALS FOR MICRO- AND NANOELECTRONICS

Abstract

The article briefly describes the principle and operating modes of atomic-force microscope (AFM), as well as the features of microgeometry and surface properties of dielectric materials for micro and nanoelectronics using AFM method. The purpose of this article is to determine the features of microgeometry research and surface properties of dielectric materials by atomic force microscopy, as well as the advantages and limitations of the use of this method in the investigation of dielectric materials. The advantages and limitations of the application of this method for surface and surface properties of dielectrics are shown. The main directions of study of topographies, mechanical and electromagnetic properties of surfaces of dielectrics, which are carried out with the help of atomicforce microscopy method, as well as limitations and drawbacks in the use of this method in the investigation of individual properties of dielectric surfaces are also considered. The further development of this method consists in the implementation of a number of techniques and devices based on equipment for atomic-force microscopy. Perspective instrumental methods with the use of AFM show the implementation of nanodrill and nanorethene instruments, allowing the creation of micro and nanoelectric dielectrics in surfaces, forming structural formations, obtaining threads from carbon nanotubes, conducting mechanoactivation of surface layers of dielectrics by nanoparticle.

Keywords

• мікрогеометрія
• діелектрик
• мікроелектроніка
• наноелектроніка
• атомно-силова мікроскопія