2 in. Bulk β‑Ga2O3 Single Crystals Grown by EFG Method with High Wafer-Scale Quality
Ganrong Feng,
Shan Li,
Yawen Tian,
Song Qi,
Daoyou Guo,
Weihua Tang
Affiliations
Ganrong Feng
College of Integrated Circuit Science and Engineering & National and Local Joint Engineering Laboratory for RF Integration and Micro-Packing Technologies, Nanjing University of Posts and Telecommunications, Nanjing, China
Shan Li
College of Integrated Circuit Science and Engineering & National and Local Joint Engineering Laboratory for RF Integration and Micro-Packing Technologies, Nanjing University of Posts and Telecommunications, Nanjing, China
Yawen Tian
Beijing GAO Semiconductor Co. Ltd., Beijing, China
Song Qi
Beijing GAO Semiconductor Co. Ltd., Beijing, China
Daoyou Guo
Center for Optoelectronics Materials and Devices & Key Laboratory of Optical Field Manipulation of Zhejiang Province, Department of Physics, Zhejiang Sci-Tech University, Hangzhou, China
Weihua Tang
College of Integrated Circuit Science and Engineering & National and Local Joint Engineering Laboratory for RF Integration and Micro-Packing Technologies, Nanjing University of Posts and Telecommunications, Nanjing, China
