Laser direct writing of Ga2O3/liquid metal-based flexible humidity sensors

Songya Cui; Yuyao Lu; Depeng Kong; Huayu Luo; Liang Peng; Geng Yang; Huayong Yang; Kaichen Xu

doi:10.29026/oea.2023.220172

Opto-Electronic Advances (Jul 2023)

Laser direct writing of Ga2O3/liquid metal-based flexible humidity sensors

Songya Cui,
Yuyao Lu,
Depeng Kong,
Huayu Luo,
Liang Peng,
Geng Yang,
Huayong Yang,
Kaichen Xu

Affiliations

Songya Cui: State Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University, Hangzhou 310030, China
Yuyao Lu: State Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University, Hangzhou 310030, China
Depeng Kong: State Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University, Hangzhou 310030, China
Huayu Luo: State Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University, Hangzhou 310030, China
Liang Peng: School of Information and Electrical Engineering, Hangzhou City University, Hangzhou 310015, China
Geng Yang: State Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University, Hangzhou 310030, China
Huayong Yang: State Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University, Hangzhou 310030, China
Kaichen Xu: State Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University, Hangzhou 310030, China

DOI: https://doi.org/10.29026/oea.2023.220172
Journal volume & issue: Vol. 6, no. 7
pp. 1 – 10

Abstract

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Flexible and wearable humidity sensors play a vital role in daily point-of-care diagnosis and noncontact human-machine interactions. However, achieving a facile and high-speed fabrication approach to realizing flexible humidity sensors remains a challenge. In this work, a wearable capacitive-type Ga2O3/liquid metal-based humidity sensor is demonstrated by a one-step laser direct writing technique. Owing to the photothermal effect of laser, the Ga2O3-wrapped liquid metal particles can be selectively sintered and converted from insulative to conductive traces with a resistivity of 0.19 Ω·cm, while the untreated regions serve as active sensing layers in response to moisture changes. Under 95% relative humidity, the humidity sensor displays a highly stable performance along with rapid response and recover time. Utilizing these superior properties, the Ga2O3/liquid metal-based humidity sensor is able to monitor human respiration rate, as well as skin moisture of the palm under different physiological states for healthcare monitoring.

Published in Opto-Electronic Advances

ISSN: 2096-4579 (Print)
Publisher: Institue of Optics and Electronics, Chinese Academy of Sciences
Country of publisher: China
LCC subjects: Science: Physics: Optics. Light
Website: http://www.oejournal.org/oea

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