Investigation of Composite Structure with Dual Fabry–Perot Cavities for Temperature and Pressure Sensing

Abstract

To deeply analyze the influence of diaphragm materials on the temperature and pressure sensitivity of Fabry–Perot interferometer-based dual-parameter fiber sensors, the multiple transfer method was used to fabricate the dual Fabry–Perot cavities, respectively, consisting of the following combinations: epoxy resin AB/polydimethylsiloxane (PDMS), Ecoflex0030 silicone rubber /PDMS, and PDMS/Ecoflex0030 silicone rubber. Experimental results show that the temperature sensitivities are, respectively, 528, 540, and 1033 pm/°C in the range of 40–100 °C. Within the applied pressure range of 100–400 kPa, the pressure sensitivities are, respectively, 16.0, 34.6, and 30.2 pm/kPa. The proposed sensors have advantages of proper sensitivity, simple fabrication, cost-effectiveness, controllable cavity length, and suitability for practical sensing applications.

Keywords

• Fabry–Perot cavity
• temperature/pressure sensing
• composite structure
• multiple transfer method