Pragmatic Micrometre to Millimetre Calibration Using Multiple Methods for Low-Coherence Interferometer in Embedded Metrology Applications

Abstract

In-situ metrology utilised for surface topography, texture and form analysis along with quality control processes requires a high-level of reliability. Hence, a traceable method for calibrating the measurement system’s transfer function is required at regular intervals. This paper compares three methods of dimensional calibration for a spectral domain low coherence interferometer using a reference laser interferometer versus two types of single material measure. Additionally, the impact of dataset sparsity is shown along with the effect of using a singular calibration dataset for system performance when operating across different media.

Keywords

• calibration
• metrology
• low-coherence interferometry