Cross-Sensitivity of an Optomechanical MEMS Transducer

Abstract

This work presents the investigation on a MEMS based optomechanical transducer for displacements or vibration regarding its cross-sensitivities to multidirectional input excitations. The principle of the optomechanical transducer is based on the modulation of the light flux passing through one static and one movable micromechanical aperture. This kind of transducer is of increasing interest for MEMS sensors since it has inherent benefits and can compete with state-ofthe- art readout concepts regarding its resolution. We have experimentally proven that the sensitivities of the device is 3.3 × 107 V/m in x-direction, 8.23 × 106 V/m in y-direction, while it is negligible in z-direction.

Keywords

• optomechanical
• MEMS
• cross-sensitivity
• transducer