Residual stresses in AlCrN PVD thin films

Abstract

Residual stresses may affect the mechanical stability of high quality coatings such as Al1-xCrxN. In this study, two different physical vapour deposition techniques leading to different residuals stress states have been used for depositing Al1-xCrxN coatings varying the chromium content. The structure and residual stress state have been investigated in Al1-xCrxN coatings deposited on silicon substrates using X-ray diffraction, curvature measurements and nanoindentation. The obtained results are compared to literature and commented in view of the coating microstructure.