New Heteroleptic Germanium Precursors for GeO2 Thin Films by Atomic Layer Deposition

• Heenang Choi,
• Chanwoo Park,
• Sung Kwang Lee,
• Ji Yeon Ryu,
• Seung Uk Son,
• Taeyong Eom,
• Taek-Mo Chung

Affiliations

Heenang Choi

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of Korea

Chanwoo Park

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of Korea

Sung Kwang Lee

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of Korea

Ji Yeon Ryu

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of Korea

Seung Uk Son

Department of Chemistry, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do, Republic of Korea

Taeyong Eom

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of Korea

Taek-Mo Chung

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of Korea