Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices

Jaume Verd; Jaume Segura

doi:10.3390/mi10040273

Micromachines (Apr 2019)

Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices

Jaume Verd,
Jaume Segura

Affiliations

Jaume Verd: Electronic Systems Group (GSE), University of the Balearic Islands, E-07122 Palma (Illes Balears), Spain
Jaume Segura: Electronic Systems Group (GSE), University of the Balearic Islands, E-07122 Palma (Illes Balears), Spain

DOI: https://doi.org/10.3390/mi10040273
Journal volume & issue: Vol. 10, no. 4
p. 273

Abstract

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Micro and nanoelectromechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within integrated circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors [...]

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Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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