Influence of radio frequency wave driving frequency on capacitively coupled plasma discharge

Abstract

A two-dimensional symmetric fluid model is established to study the influence of radio frequency (RF) wave driving frequency on the capacitively coupled plasma discharge. The relationship between the driving frequency and electron density is obtained by solving the electron energy balance equation. The calculation results show that the average electron density first increases rapidly with the increase in driving frequency and then gradually tends to saturation at a threshold frequency. A fluid simulation is also carried out, which provides similar results. Physical studies on this phenomenon are conducted, revealing that the essence of this phenomenon is due to the inability of electrons to quickly respond to potential changes within the boundary sheath when the driving frequency of RF exceeds the plasma frequency. In addition, it is also found that increasing gas pressure can enhance the electron density and the type of gas can also affect the electron density.