Shape Transformation Photolithography: Self-Assembled Arrays of Suspended MEMS Structures from Patterned Polymer Membranes

• Andriy Sherehiy,
• Jeremy M. Rathfon,
• Hiroya Abe,
• Sri Sukanta Chowdhury,
• Robert W. Cohn

Affiliations

Andriy Sherehiy

ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky, United States

Jeremy M. Rathfon

ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky, United States

Hiroya Abe

ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky, United States

Sri Sukanta Chowdhury

ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky, United States

Robert W. Cohn

ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky, United States