Full extraction of the COM parameters for Rayleigh type surface acoustic wave

Abstract

Extraction of Coupling of Modes (COM) parameters is important in the design of modern high-performance surface acoustic wave (SAW) devices. In this study, we established an effective connection between the COM parameters and the results of stationary and eigenfrequency studies based on the finite element method. Based on this connection, we proposed an approach for fast and full extraction of the COM parameters including the phases of coupling reflection and transduction coefficient. The COM parameters of the commonly used electrode width controlled single-phase unidirectional transducer and bidirectional interdigital transducer cells are computed and compared. It shows that this is a fast, accurate, general, and full extraction of the COM parameters for Rayleigh type SAW.